EN 
ZH 
DE 
ES 
FR 
JA 
KO 
RU 
PT 
Chemical Product Introduction: Sputtering Targets
High-Purity Titanium Vacuum Coating Targets (Sputtering Targets)
Grades: Ti 99.9% (3N), Ti 99.99% (4N), Ti 99.999% (5N)
Shapes: Round targets (Ø50mm–Ø300mm), Rectangular plate targets (Max. 600×1200mm), Tube targets (custom sizes).
Applications: Semiconductor thin films, optical coatings, solar PV, display panels (OLED/TFT), decorative coatings.
Key Technical Specifications (International Standards)
1. Chemical Composition
| Element | Ti 99.9% (ppm) | Ti 99.99% (ppm) | Ti 99.999% (ppm) |
|---|---|---|---|
| Fe | ≤500 | ≤50 | ≤5 |
| O | ≤800 | ≤100 | ≤10 |
| C | ≤100 | ≤30 | ≤5 |
| N | ≤50 | ≤20 | ≤5 |
| Other impurities | ≤700 | ≤100 | ≤20 |
2. Mechanical Properties
| Parameter | Typical Values |
|---|---|
| Density | 4.51 g/cm³ |
| Tensile Strength | 240–350 MPa |
| Vickers Hardness (HV) | 90–120 |
| Grain Size | ≤50μm (custom ≤20μm) |
3. Physical Specifications
Grain Size Control: Optimized via HIP (Hot Isostatic Pressing) or forging (SEM reports available).
Surface Finish:
Polished: Ra ≤0.4μm (mirror finish, ideal for optical coatings).
Machined: Ra ≤1.6μm (standard industrial grade).
Flatness: ≤0.05mm/100mm (laser interferometer tested).
Bonding Compatibility: Pre-bonded with Cu/Al backing plates (optional).
Quality Assurance & Certifications
Testing Standards: ASTM B265 (plate), ASTM F67 (medical grade), JIS H4600.
Certificates: Third-party lab reports (SGS/BV), material traceability certificates.
Packaging: Vacuum-sealed + shock-proof wooden crates (ISO shipping compliant).
Buyer’s Guide
Material Selection:
Semiconductors/PV: Use 4N/5N grade (O≤10ppm).
Decorative Coatings: Cost-effective 3N grade suffices.
Lead Time:
Standard sizes: 7–15 days (in-stock).
Custom sizes: 30–45 days .
Technical Support: Free sputtering parameter recommendations (e.g., DC/RF power, substrate temperature).
